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Modified mason model for bulk acoustic wave resonators.
IEEE Trans Ultrason Ferroelectr Freq Control. 2008 Sep; 55(9):2025-9.IT

Abstract

Accurate modeling of a bulk acoustic wave resonator frequency response is limited by the inability of the current 1-D models to simulate certain parasitic modes excited in realistic 3-D structures. A simple technique is proposed to simulate such parasitic modes by employing the 1-D Mason Model of a resonator and a coupling term between the fundamental mode and those parasitic modes. This Modified Mason Model allows accurate simulation of resonators with arbitrary impedance and arbitrary resonating frequency. Finally, the model's prediction is compared with the on-wafer measurement of a ladder-type filter composed of several resonators.

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Publisher Full Text (DOI)

Authors+Show Affiliations

Jamneala T
Avago Technologies, Wireless Semiconductor Division, San Jose, CA, USA. tiberiu.jamneala@avagotech.com
Bradley P
No affiliation info available
Koelle UB
No affiliation info available
Chien A
No affiliation info available

MeSH

AcousticsAlgorithmsComputer SimulationComputer-Aided DesignEquipment DesignEquipment Failure AnalysisModels, TheoreticalTransducersVibration

Pub Type(s)

Evaluation Study
Journal Article

Language

eng

PubMed ID

18986898

Citation

Jamneala, Tiberiu, et al. "Modified Mason Model for Bulk Acoustic Wave Resonators." IEEE Transactions On Ultrasonics, Ferroelectrics, and Frequency Control, vol. 55, no. 9, 2008, pp. 2025-9.
Jamneala T, Bradley P, Koelle UB, et al. Modified mason model for bulk acoustic wave resonators. IEEE Trans Ultrason Ferroelectr Freq Control. 2008;55(9):2025-9.
Jamneala, T., Bradley, P., Koelle, U. B., & Chien, A. (2008). Modified mason model for bulk acoustic wave resonators. IEEE Transactions On Ultrasonics, Ferroelectrics, and Frequency Control, 55(9), 2025-9. https://doi.org/10.1109/TUFFC.893
Jamneala T, et al. Modified Mason Model for Bulk Acoustic Wave Resonators. IEEE Trans Ultrason Ferroelectr Freq Control. 2008;55(9):2025-9. PubMed PMID: 18986898.
* Article titles in AMA citation format should be in sentence-case
TY - JOUR T1 - Modified mason model for bulk acoustic wave resonators. AU - Jamneala,Tiberiu, AU - Bradley,Paul, AU - Koelle,Uli B, AU - Chien,Allen, PY - 2008/11/7/pubmed PY - 2009/1/31/medline PY - 2008/11/7/entrez SP - 2025 EP - 9 JF - IEEE transactions on ultrasonics, ferroelectrics, and frequency control JO - IEEE Trans Ultrason Ferroelectr Freq Control VL - 55 IS - 9 N2 - Accurate modeling of a bulk acoustic wave resonator frequency response is limited by the inability of the current 1-D models to simulate certain parasitic modes excited in realistic 3-D structures. A simple technique is proposed to simulate such parasitic modes by employing the 1-D Mason Model of a resonator and a coupling term between the fundamental mode and those parasitic modes. This Modified Mason Model allows accurate simulation of resonators with arbitrary impedance and arbitrary resonating frequency. Finally, the model's prediction is compared with the on-wafer measurement of a ladder-type filter composed of several resonators. SN - 1525-8955 UR - https://www.unboundmedicine.com/medline/citation/18986898/Modified_mason_model_for_bulk_acoustic_wave_resonators_ L2 - https://dx.doi.org/10.1109/TUFFC.893 DB - PRIME DP - Unbound Medicine ER -