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Investigations on LGS and LGT crystals to realize BAW resonators.

Abstract

The LGS family are promising materials for the design of high quality bulk acoustic wave resonators. We have manufactured many plano-convex 10 MHz 5th overtone Y-cut resonators using langasite (LGS, La(3)Ga(5)SiO(14)) and langatate (LGT, La(3)Ga(5.5)Ta(0.5)O(14)) crystals. We observed that the quality factor strongly depends on the polishing method, the supplier of the material, and on the energy trapping. For quartz crystals, we have found that resulting IR spectra exhibit absorption peaks more or less deep, linked to defects. These predominant criteria are not surprising, but they have to be defined in manner similar to that used for quartz crystal. A satisfying machining and polishing method has been first applied to elaborate high Q resonators, and a comparison between samples of LGS and LGT materials from different suppliers is established. In addition, LGT resonators are characterized by their motional parameters and frequency-temperature curves. Nevertheless, one of the main results is that the measured Q x f product is not the expected one. We present results of Q-factor versus radius of curvature: it appears that an optimization should be performed and that this last one cannot be directly transposed from that of quartz crystal resonator. Currently, the best resonator that we have made has a Q x f product of 1.4 x 10(13) on its 5th overtone (1.7 x 10(13) on its 9th overtone). This result is slightly higher than the similar parameter obtained on a state-of-the-art SC-cut quartz crystal resonator working at the same frequency.

Authors+Show Affiliations

Laboratoire de Chronometrie d'Electronique et de Piezoelectricite Department, Franche Comte Electronique Mecanique Thermique et Optique-Sciences et Technologies Institute, Besancon, France. joel.imbaud@ens2m.frNo affiliation info availableNo affiliation info availableNo affiliation info availableNo affiliation info available

Pub Type(s)

Journal Article
Research Support, Non-U.S. Gov't

Language

eng

PubMed ID

19049918

Citation

Imbaud, Joël, et al. "Investigations On LGS and LGT Crystals to Realize BAW Resonators." IEEE Transactions On Ultrasonics, Ferroelectrics, and Frequency Control, vol. 55, no. 11, 2008, pp. 2384-91.
Imbaud J, Boy JJ, Galliou S, et al. Investigations on LGS and LGT crystals to realize BAW resonators. IEEE Trans Ultrason Ferroelectr Freq Control. 2008;55(11):2384-91.
Imbaud, J., Boy, J. J., Galliou, S., Bourquin, R., & Romand, J. P. (2008). Investigations on LGS and LGT crystals to realize BAW resonators. IEEE Transactions On Ultrasonics, Ferroelectrics, and Frequency Control, 55(11), 2384-91. https://doi.org/10.1109/TUFFC.946
Imbaud J, et al. Investigations On LGS and LGT Crystals to Realize BAW Resonators. IEEE Trans Ultrason Ferroelectr Freq Control. 2008;55(11):2384-91. PubMed PMID: 19049918.
* Article titles in AMA citation format should be in sentence-case
TY - JOUR T1 - Investigations on LGS and LGT crystals to realize BAW resonators. AU - Imbaud,Joël, AU - Boy,Jean-Jacques, AU - Galliou,Serge, AU - Bourquin,Roger, AU - Romand,Jean Pierre, PY - 2008/12/4/pubmed PY - 2009/1/31/medline PY - 2008/12/4/entrez SP - 2384 EP - 91 JF - IEEE transactions on ultrasonics, ferroelectrics, and frequency control JO - IEEE Trans Ultrason Ferroelectr Freq Control VL - 55 IS - 11 N2 - The LGS family are promising materials for the design of high quality bulk acoustic wave resonators. We have manufactured many plano-convex 10 MHz 5th overtone Y-cut resonators using langasite (LGS, La(3)Ga(5)SiO(14)) and langatate (LGT, La(3)Ga(5.5)Ta(0.5)O(14)) crystals. We observed that the quality factor strongly depends on the polishing method, the supplier of the material, and on the energy trapping. For quartz crystals, we have found that resulting IR spectra exhibit absorption peaks more or less deep, linked to defects. These predominant criteria are not surprising, but they have to be defined in manner similar to that used for quartz crystal. A satisfying machining and polishing method has been first applied to elaborate high Q resonators, and a comparison between samples of LGS and LGT materials from different suppliers is established. In addition, LGT resonators are characterized by their motional parameters and frequency-temperature curves. Nevertheless, one of the main results is that the measured Q x f product is not the expected one. We present results of Q-factor versus radius of curvature: it appears that an optimization should be performed and that this last one cannot be directly transposed from that of quartz crystal resonator. Currently, the best resonator that we have made has a Q x f product of 1.4 x 10(13) on its 5th overtone (1.7 x 10(13) on its 9th overtone). This result is slightly higher than the similar parameter obtained on a state-of-the-art SC-cut quartz crystal resonator working at the same frequency. SN - 1525-8955 UR - https://www.unboundmedicine.com/medline/citation/19049918/Investigations_on_LGS_and_LGT_crystals_to_realize_BAW_resonators_ L2 - https://dx.doi.org/10.1109/TUFFC.946 DB - PRIME DP - Unbound Medicine ER -