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High frequency shear horizontal plate acoustic wave devices.
Ultrasonics. 2009 Dec; 49(8):760-4.U

Abstract

It has been shown recently that shear horizontal acoustic waves propagating in piezoelectric plates whose thickness h is much less than the acoustic wavelength lambda possess a number of attractive properties for use in sensor and signal processing applications. In order to exploit the potential benefits of these waves, however, one needs to fabricate devices on very thin plates. We have developed a suitable fabrication method which can be used to realize devices on such thin plates. In this method, the device is first fabricated on a plate of normal thickness (approximately 500 microm) and the substrate is then lapped from the back side to reduce the thickness. The technique has been utilized to realize devices on plates of thickness less than 70 microm. A shear horizontal plate acoustic wave (SH-PAW) delay line of fundamental resonant frequency greater than 25 MHz and insertion loss less than 7 dB has been realized on a 60 microm thick Y--cut, X--propagation lithium niobate substrate. The device also shows strong response near the third harmonic frequency of 75 MHz.

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Authors+Show Affiliations

Vohra G
Department of Electrical and Computer Engineering, Marquette University, Milwaukee, WI 53201-1881, USA.
Joshi SG
No affiliation info available
Zaitsev BD
No affiliation info available
Kuznetsova IE
No affiliation info available
Teplykh AA
No affiliation info available

MeSH

AcousticsComputer-Aided DesignEquipment DesignEquipment Failure AnalysisMicro-Electrical-Mechanical SystemsReproducibility of ResultsScattering, RadiationSensitivity and Specificity

Pub Type(s)

Evaluation Study
Journal Article
Research Support, Non-U.S. Gov't
Research Support, U.S. Gov't, Non-P.H.S.

Language

eng

PubMed ID

19577781

Citation

Vohra, G, et al. "High Frequency Shear Horizontal Plate Acoustic Wave Devices." Ultrasonics, vol. 49, no. 8, 2009, pp. 760-4.
Vohra G, Joshi SG, Zaitsev BD, et al. High frequency shear horizontal plate acoustic wave devices. Ultrasonics. 2009;49(8):760-4.
Vohra, G., Joshi, S. G., Zaitsev, B. D., Kuznetsova, I. E., & Teplykh, A. A. (2009). High frequency shear horizontal plate acoustic wave devices. Ultrasonics, 49(8), 760-4. https://doi.org/10.1016/j.ultras.2009.05.011
Vohra G, et al. High Frequency Shear Horizontal Plate Acoustic Wave Devices. Ultrasonics. 2009;49(8):760-4. PubMed PMID: 19577781.
* Article titles in AMA citation format should be in sentence-case
TY - JOUR T1 - High frequency shear horizontal plate acoustic wave devices. AU - Vohra,G, AU - Joshi,S G, AU - Zaitsev,B D, AU - Kuznetsova,I E, AU - Teplykh,A A, Y1 - 2009/06/09/ PY - 2007/08/24/received PY - 2009/04/07/revised PY - 2009/05/27/accepted PY - 2009/7/7/entrez PY - 2009/7/7/pubmed PY - 2009/12/16/medline SP - 760 EP - 4 JF - Ultrasonics JO - Ultrasonics VL - 49 IS - 8 N2 - It has been shown recently that shear horizontal acoustic waves propagating in piezoelectric plates whose thickness h is much less than the acoustic wavelength lambda possess a number of attractive properties for use in sensor and signal processing applications. In order to exploit the potential benefits of these waves, however, one needs to fabricate devices on very thin plates. We have developed a suitable fabrication method which can be used to realize devices on such thin plates. In this method, the device is first fabricated on a plate of normal thickness (approximately 500 microm) and the substrate is then lapped from the back side to reduce the thickness. The technique has been utilized to realize devices on plates of thickness less than 70 microm. A shear horizontal plate acoustic wave (SH-PAW) delay line of fundamental resonant frequency greater than 25 MHz and insertion loss less than 7 dB has been realized on a 60 microm thick Y--cut, X--propagation lithium niobate substrate. The device also shows strong response near the third harmonic frequency of 75 MHz. SN - 1874-9968 UR - https://www.unboundmedicine.com/medline/citation/19577781/High_frequency_shear_horizontal_plate_acoustic_wave_devices_ L2 - https://linkinghub.elsevier.com/retrieve/pii/S0041-624X(09)00070-5 DB - PRIME DP - Unbound Medicine ER -