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Experimental investigation of acoustic substrate losses in 1850-MHz thin film BAW resonators.
IEEE Trans Ultrason Ferroelectr Freq Control. 2009 Nov; 56(11):2544-52.IT

Abstract

After optimizing for electromechanical coupling coefficient K(2), the main performance improvement in the thin film bulk acoustic wave resonators and filters can be achieved by improving the Q value, i.e., minimizing the losses. In Bragg-reflector-based solidly mounted resonator technology, a significant improvement of Q has been achieved by optimizing the reflector not only for longitudinal wave, the intended operation mode, but also for shear waves. We have investigated the remaining acoustic radiation losses to the substrate in so-optimized 1850-MHz AlN resonators by removing the substrate underneath the resonators and comparing the devices with and without substrate by electrical characterization before and after the substrate removal. Several methods to extract Q-values of the resonators are compared. Changes caused by substrate removal are observed in resonator behavior, but no significant improvement in Q-values can be confirmed. Loss mechanisms other than substrate leakage are concluded to dominate the resonator Q-value. Difficulties of detecting small changes in the Q-values of the resonators are also discussed.

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Publisher Full Text (DOI)

Authors+Show Affiliations

Pensala T
VTT Technical Research Centre of Finland, Espoo, Finland. tuomas.pensala@vtt.fi
Thalhammer R
No affiliation info available
Dekker J
No affiliation info available
Kaitila J
No affiliation info available

MeSH

AcousticsComputer-Aided DesignEnergy TransferEquipment DesignEquipment Failure AnalysisMembranes, ArtificialReproducibility of ResultsSensitivity and SpecificityTransducers

Pub Type(s)

Evaluation Study
Journal Article

Language

eng

PubMed ID

19942540

Citation

Pensala, Tuomas, et al. "Experimental Investigation of Acoustic Substrate Losses in 1850-MHz Thin Film BAW Resonators." IEEE Transactions On Ultrasonics, Ferroelectrics, and Frequency Control, vol. 56, no. 11, 2009, pp. 2544-52.
Pensala T, Thalhammer R, Dekker J, et al. Experimental investigation of acoustic substrate losses in 1850-MHz thin film BAW resonators. IEEE Trans Ultrason Ferroelectr Freq Control. 2009;56(11):2544-52.
Pensala, T., Thalhammer, R., Dekker, J., & Kaitila, J. (2009). Experimental investigation of acoustic substrate losses in 1850-MHz thin film BAW resonators. IEEE Transactions On Ultrasonics, Ferroelectrics, and Frequency Control, 56(11), 2544-52. https://doi.org/10.1109/TUFFC.2009.1341
Pensala T, et al. Experimental Investigation of Acoustic Substrate Losses in 1850-MHz Thin Film BAW Resonators. IEEE Trans Ultrason Ferroelectr Freq Control. 2009;56(11):2544-52. PubMed PMID: 19942540.
* Article titles in AMA citation format should be in sentence-case
TY - JOUR T1 - Experimental investigation of acoustic substrate losses in 1850-MHz thin film BAW resonators. AU - Pensala,Tuomas, AU - Thalhammer,Robert, AU - Dekker,James, AU - Kaitila,Jyrki, PY - 2009/11/28/entrez PY - 2009/11/28/pubmed PY - 2010/2/23/medline SP - 2544 EP - 52 JF - IEEE transactions on ultrasonics, ferroelectrics, and frequency control JO - IEEE Trans Ultrason Ferroelectr Freq Control VL - 56 IS - 11 N2 - After optimizing for electromechanical coupling coefficient K(2), the main performance improvement in the thin film bulk acoustic wave resonators and filters can be achieved by improving the Q value, i.e., minimizing the losses. In Bragg-reflector-based solidly mounted resonator technology, a significant improvement of Q has been achieved by optimizing the reflector not only for longitudinal wave, the intended operation mode, but also for shear waves. We have investigated the remaining acoustic radiation losses to the substrate in so-optimized 1850-MHz AlN resonators by removing the substrate underneath the resonators and comparing the devices with and without substrate by electrical characterization before and after the substrate removal. Several methods to extract Q-values of the resonators are compared. Changes caused by substrate removal are observed in resonator behavior, but no significant improvement in Q-values can be confirmed. Loss mechanisms other than substrate leakage are concluded to dominate the resonator Q-value. Difficulties of detecting small changes in the Q-values of the resonators are also discussed. SN - 1525-8955 UR - https://www.unboundmedicine.com/medline/citation/19942540/Experimental_investigation_of_acoustic_substrate_losses_in_1850_MHz_thin_film_BAW_resonators_ L2 - https://dx.doi.org/10.1109/TUFFC.2009.1341 DB - PRIME DP - Unbound Medicine ER -