Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film.IEEE Trans Ultrason Ferroelectr Freq Control. 2011 Apr; 58(4):685-8.IT
The electro-mechanical coupling and resonance characteristics of a piezoelectric modulated thin film bulk acoustic wave resonator (PMBAR) is described quantitatively. The derived 1-D analytical model is in agreement with 2-D finite element modeling (FEM). The modeling shows that a pure shear mode excitation can be achieved and that coupling of parasitic Lamb waves is reduced in this design.