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Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film.
IEEE Trans Ultrason Ferroelectr Freq Control. 2011 Apr; 58(4):685-8.IT

Abstract

The electro-mechanical coupling and resonance characteristics of a piezoelectric modulated thin film bulk acoustic wave resonator (PMBAR) is described quantitatively. The derived 1-D analytical model is in agreement with 2-D finite element modeling (FEM). The modeling shows that a pure shear mode excitation can be achieved and that coupling of parasitic Lamb waves is reduced in this design.

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Publisher Full Text (DOI)

Authors

Milyutin E
No affiliation info available
Muralt P
No affiliation info available

MeSH

AcousticsComputer SimulationElectrochemistryElectrodesEquipment DesignFinite Element AnalysisMembranes, ArtificialMicro-Electrical-Mechanical SystemsTransducersVibration

Pub Type(s)

Letter
Research Support, Non-U.S. Gov't

Language

eng

PubMed ID

21507745

Citation

Milyutin, Evgeny, and Paul Muralt. "Electro-mechanical Coupling in Shear-mode FBAR With Piezoelectric Modulated Thin Film." IEEE Transactions On Ultrasonics, Ferroelectrics, and Frequency Control, vol. 58, no. 4, 2011, pp. 685-8.
Milyutin E, Muralt P. Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film. IEEE Trans Ultrason Ferroelectr Freq Control. 2011;58(4):685-8.
Milyutin, E., & Muralt, P. (2011). Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film. IEEE Transactions On Ultrasonics, Ferroelectrics, and Frequency Control, 58(4), 685-8. https://doi.org/10.1109/TUFFC.2011.1860
Milyutin E, Muralt P. Electro-mechanical Coupling in Shear-mode FBAR With Piezoelectric Modulated Thin Film. IEEE Trans Ultrason Ferroelectr Freq Control. 2011;58(4):685-8. PubMed PMID: 21507745.
* Article titles in AMA citation format should be in sentence-case
TY - JOUR T1 - Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film. AU - Milyutin,Evgeny, AU - Muralt,Paul, PY - 2011/4/22/entrez PY - 2011/4/22/pubmed PY - 2011/8/24/medline SP - 685 EP - 8 JF - IEEE transactions on ultrasonics, ferroelectrics, and frequency control JO - IEEE Trans Ultrason Ferroelectr Freq Control VL - 58 IS - 4 N2 - The electro-mechanical coupling and resonance characteristics of a piezoelectric modulated thin film bulk acoustic wave resonator (PMBAR) is described quantitatively. The derived 1-D analytical model is in agreement with 2-D finite element modeling (FEM). The modeling shows that a pure shear mode excitation can be achieved and that coupling of parasitic Lamb waves is reduced in this design. SN - 1525-8955 UR - https://www.unboundmedicine.com/medline/citation/21507745/Electro_mechanical_coupling_in_shear_mode_FBAR_with_piezoelectric_modulated_thin_film_ DB - PRIME DP - Unbound Medicine ER -