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Transverse waveguide mode suppression for Pt-electrode SAW resonators on quartz and LGS.
IEEE Trans Ultrason Ferroelectr Freq Control. 2011 Dec; 58(12):2727-36.IT

Abstract

SAW resonators on ST-X quartz and langasite (LGS) [0°, 144°, 24°] are currently being used for hydrogen fluoride (HF) vapor sensing and high-temperature sensing, respectively. For these applications, the use of Pt-based electrodes allows the resonators to withstand the targeted harsh environments. This work reveals that for Pt-electrode resonators with conventional short-circuit gratings on the aforementioned quartz and LGS orientations, acoustic energy leaks from the grating region to the bus bars, thus degrading the resonator response. To resolve this problem, this paper proposes and implements open-circuit gratings for resonators fabricated with these substrate/metal combinations. The open-circuit gratings guide the acoustic energy within the grating region, resulting in greater quality factors and reduced losses in the resonator response. In addition, scalar potential theory is utilized in this work to identify transverse waveguide modes in the responses of open-circuit grating resonators on quartz and LGS. A transverse waveguide mode dispersion relation was derived to extend the scalar potential theory to account for asymmetry in the slowness curve around the propagation direction. This is the case for several commonly used LGS orientations, in particular LGS [0°, 144°, 24°]. Finally, this work addresses spurious transverse mode mitigation by scaling both the transducer's grating aperture and electrode overlap width. Open circuit grating resonators with appropriately scaled transducer designs were fabricated and tested, resulting in a 71% increase in quality factor and a spurious mode rejection of over 26 dBc for Pt-electrode devices on ST-X quartz. This progress directly translates into better frequency resolution and increased dynamic range for HF vapor sensors and high-temperature SAW devices.

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Publisher Full Text (DOI)

Authors+Show Affiliations

Meulendyk BJ
Department of Electrical and Computer Engineering, Laboratory for Surface Science and Technology, University of Maine, Orono, ME, USA.
Pereira da Cunha M
No affiliation info available

MeSH

Computer-Aided DesignElectrodesEquipment DesignEquipment Failure AnalysisMicro-Electrical-Mechanical SystemsPlatinumQuartzScattering, RadiationSilicatesTransducers

Pub Type(s)

Journal Article
Research Support, Non-U.S. Gov't

Language

eng

PubMed ID

23443708

Citation

Meulendyk, Bennett J., and Mauricio Pereira da Cunha. "Transverse Waveguide Mode Suppression for Pt-electrode SAW Resonators On Quartz and LGS." IEEE Transactions On Ultrasonics, Ferroelectrics, and Frequency Control, vol. 58, no. 12, 2011, pp. 2727-36.
Meulendyk BJ, Pereira da Cunha M. Transverse waveguide mode suppression for Pt-electrode SAW resonators on quartz and LGS. IEEE Trans Ultrason Ferroelectr Freq Control. 2011;58(12):2727-36.
Meulendyk, B. J., & Pereira da Cunha, M. (2011). Transverse waveguide mode suppression for Pt-electrode SAW resonators on quartz and LGS. IEEE Transactions On Ultrasonics, Ferroelectrics, and Frequency Control, 58(12), 2727-36. https://doi.org/10.1109/TUFFC.2011.2135
Meulendyk BJ, Pereira da Cunha M. Transverse Waveguide Mode Suppression for Pt-electrode SAW Resonators On Quartz and LGS. IEEE Trans Ultrason Ferroelectr Freq Control. 2011;58(12):2727-36. PubMed PMID: 23443708.
* Article titles in AMA citation format should be in sentence-case
TY - JOUR T1 - Transverse waveguide mode suppression for Pt-electrode SAW resonators on quartz and LGS. AU - Meulendyk,Bennett J, AU - Pereira da Cunha,Mauricio, PY - 2013/2/28/entrez PY - 2011/12/1/pubmed PY - 2013/7/13/medline SP - 2727 EP - 36 JF - IEEE transactions on ultrasonics, ferroelectrics, and frequency control JO - IEEE Trans Ultrason Ferroelectr Freq Control VL - 58 IS - 12 N2 - SAW resonators on ST-X quartz and langasite (LGS) [0°, 144°, 24°] are currently being used for hydrogen fluoride (HF) vapor sensing and high-temperature sensing, respectively. For these applications, the use of Pt-based electrodes allows the resonators to withstand the targeted harsh environments. This work reveals that for Pt-electrode resonators with conventional short-circuit gratings on the aforementioned quartz and LGS orientations, acoustic energy leaks from the grating region to the bus bars, thus degrading the resonator response. To resolve this problem, this paper proposes and implements open-circuit gratings for resonators fabricated with these substrate/metal combinations. The open-circuit gratings guide the acoustic energy within the grating region, resulting in greater quality factors and reduced losses in the resonator response. In addition, scalar potential theory is utilized in this work to identify transverse waveguide modes in the responses of open-circuit grating resonators on quartz and LGS. A transverse waveguide mode dispersion relation was derived to extend the scalar potential theory to account for asymmetry in the slowness curve around the propagation direction. This is the case for several commonly used LGS orientations, in particular LGS [0°, 144°, 24°]. Finally, this work addresses spurious transverse mode mitigation by scaling both the transducer's grating aperture and electrode overlap width. Open circuit grating resonators with appropriately scaled transducer designs were fabricated and tested, resulting in a 71% increase in quality factor and a spurious mode rejection of over 26 dBc for Pt-electrode devices on ST-X quartz. This progress directly translates into better frequency resolution and increased dynamic range for HF vapor sensors and high-temperature SAW devices. SN - 1525-8955 UR - https://www.unboundmedicine.com/medline/citation/23443708/Transverse_waveguide_mode_suppression_for_Pt_electrode_SAW_resonators_on_quartz_and_LGS_ L2 - https://dx.doi.org/10.1109/TUFFC.2011.2135 DB - PRIME DP - Unbound Medicine ER -