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Bio-Inspired Stretchable Absolute Pressure Sensor Network.
Sensors (Basel) 2016; 16(1)S

Abstract

A bio-inspired absolute pressure sensor network has been developed. Absolute pressure sensors, distributed on multiple silicon islands, are connected as a network by stretchable polyimide wires. This sensor network, made on a 4'' wafer, has 77 nodes and can be mounted on various curved surfaces to cover an area up to 0.64 m × 0.64 m, which is 100 times larger than its original size. Due to Micro Electro-Mechanical system (MEMS) surface micromachining technology, ultrathin sensing nodes can be realized with thicknesses of less than 100 µm. Additionally, good linearity and high sensitivity (~14 mV/V/bar) have been achieved. Since the MEMS sensor process has also been well integrated with a flexible polymer substrate process, the entire sensor network can be fabricated in a time-efficient and cost-effective manner. Moreover, an accurate pressure contour can be obtained from the sensor network. Therefore, this absolute pressure sensor network holds significant promise for smart vehicle applications, especially for unmanned aerial vehicles.

Authors+Show Affiliations

Department of Electrical Engineering, Stanford University, 350 Serra Mall, Stanford, CA 94305, USA. yueguo@stanford.edu.Department of Materials Science and Engineering, Stanford University, 476 Lomita Mall, Stanford, CA 94305, USA. liyuhung@stanford.edu.Department of Mechanical Engineering, Stanford University, 440 Escondido Mall, Stanford, CA 94305, USA. zguo@stanford.edu.Department of Electrical Engineering, Stanford University, 350 Serra Mall, Stanford, CA 94305, USA. kyunglok.kim@gmail.com.Department of Aeronautics and Astronautics, Stanford University, 496 Lomita Mall, Stanford, CA 94305, USA. fkchang@stanford.edu.Department of Electrical Engineering, Stanford University, 350 Serra Mall, Stanford, CA 94305, USA. sxwang@stanford.edu. Department of Materials Science and Engineering, Stanford University, 476 Lomita Mall, Stanford, CA 94305, USA. sxwang@stanford.edu.

Pub Type(s)

Journal Article
Research Support, U.S. Gov't, Non-P.H.S.

Language

eng

PubMed ID

26729134

Citation

Guo, Yue, et al. "Bio-Inspired Stretchable Absolute Pressure Sensor Network." Sensors (Basel, Switzerland), vol. 16, no. 1, 2016.
Guo Y, Li YH, Guo Z, et al. Bio-Inspired Stretchable Absolute Pressure Sensor Network. Sensors (Basel). 2016;16(1).
Guo, Y., Li, Y. H., Guo, Z., Kim, K., Chang, F. K., & Wang, S. X. (2016). Bio-Inspired Stretchable Absolute Pressure Sensor Network. Sensors (Basel, Switzerland), 16(1), doi:10.3390/s16010055.
Guo Y, et al. Bio-Inspired Stretchable Absolute Pressure Sensor Network. Sensors (Basel). 2016 Jan 2;16(1) PubMed PMID: 26729134.
* Article titles in AMA citation format should be in sentence-case
TY - JOUR T1 - Bio-Inspired Stretchable Absolute Pressure Sensor Network. AU - Guo,Yue, AU - Li,Yu-Hung, AU - Guo,Zhiqiang, AU - Kim,Kyunglok, AU - Chang,Fu-Kuo, AU - Wang,Shan X, Y1 - 2016/01/02/ PY - 2015/11/06/received PY - 2015/12/21/revised PY - 2015/12/29/accepted PY - 2016/1/6/entrez PY - 2016/1/6/pubmed PY - 2016/9/2/medline KW - MEMS KW - absolute pressure sensor KW - smart skin KW - stretchable network JF - Sensors (Basel, Switzerland) JO - Sensors (Basel) VL - 16 IS - 1 N2 - A bio-inspired absolute pressure sensor network has been developed. Absolute pressure sensors, distributed on multiple silicon islands, are connected as a network by stretchable polyimide wires. This sensor network, made on a 4'' wafer, has 77 nodes and can be mounted on various curved surfaces to cover an area up to 0.64 m × 0.64 m, which is 100 times larger than its original size. Due to Micro Electro-Mechanical system (MEMS) surface micromachining technology, ultrathin sensing nodes can be realized with thicknesses of less than 100 µm. Additionally, good linearity and high sensitivity (~14 mV/V/bar) have been achieved. Since the MEMS sensor process has also been well integrated with a flexible polymer substrate process, the entire sensor network can be fabricated in a time-efficient and cost-effective manner. Moreover, an accurate pressure contour can be obtained from the sensor network. Therefore, this absolute pressure sensor network holds significant promise for smart vehicle applications, especially for unmanned aerial vehicles. SN - 1424-8220 UR - https://www.unboundmedicine.com/medline/citation/26729134/Bio_Inspired_Stretchable_Absolute_Pressure_Sensor_Network_ L2 - http://www.mdpi.com/resolver?pii=s16010055 DB - PRIME DP - Unbound Medicine ER -