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Simulation of SAW Humidity Sensors Based on (11 2 ¯ 0) ZnO/R-Sapphire Structures.
Sensors (Basel). 2016 Nov 02; 16(11)S

Abstract

The characteristics of two types of surface acoustic waves SAWs (Rayleigh waves and Love waves) propagating in bilayered structures of (11 2 ¯ 0) ZnO/R-sapphire are simulated by a finite element method (FEM) model, in which both SAWs have crossed propagation directions. Furthermore, based on the bilayered structures, the frequency responses of Rayleigh wave and Love wave humidity sensors are also simulated. Meanwhile, the frequency shifts, insertion loss changes and then the sensitivities of both humidity sensors induced by the adsorbed water layer perturbations, including the mechanical and electrical factors, are calculated numerically. Generally, the characteristics and performances of both sensors are strongly dependent on the thickness of the ZnO films. By appropriate selecting the ratio of the film thickness to SAW wavelength for each kind of the sensors, the performances of both sensors can be optimized.

Authors+Show Affiliations

Laboratory of Modern Acoustics, Institute of Acoustics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China. lanxiaodong@nju.edu.cn.Laboratory of Modern Acoustics, Institute of Acoustics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China. zhangsy@nju.edu.cn.Laboratory of Modern Acoustics, Institute of Acoustics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China. FanLi@nju.edu.cn.Laboratory of Modern Acoustics, Institute of Acoustics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China. ywang@njupt.edu.cn. College of Electronic Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210046, China. ywang@njupt.edu.cn.

Pub Type(s)

Journal Article

Language

eng

PubMed ID

27827856

Citation

Lan, Xiao-Dong, et al. "Simulation of SAW Humidity Sensors Based On (11 2 ¯ 0) ZnO/R-Sapphire Structures." Sensors (Basel, Switzerland), vol. 16, no. 11, 2016.
Lan XD, Zhang SY, Fan L, et al. Simulation of SAW Humidity Sensors Based on (11 2 ¯ 0) ZnO/R-Sapphire Structures. Sensors (Basel). 2016;16(11).
Lan, X. D., Zhang, S. Y., Fan, L., & Wang, Y. (2016). Simulation of SAW Humidity Sensors Based on (11 2 ¯ 0) ZnO/R-Sapphire Structures. Sensors (Basel, Switzerland), 16(11).
Lan XD, et al. Simulation of SAW Humidity Sensors Based On (11 2 ¯ 0) ZnO/R-Sapphire Structures. Sensors (Basel). 2016 Nov 2;16(11) PubMed PMID: 27827856.
* Article titles in AMA citation format should be in sentence-case
TY - JOUR T1 - Simulation of SAW Humidity Sensors Based on (11 2 ¯ 0) ZnO/R-Sapphire Structures. AU - Lan,Xiao-Dong, AU - Zhang,Shu-Yi, AU - Fan,Li, AU - Wang,Yan, Y1 - 2016/11/02/ PY - 2016/03/30/received PY - 2016/06/24/revised PY - 2016/07/06/accepted PY - 2016/11/10/entrez PY - 2016/11/10/pubmed PY - 2016/11/10/medline KW - FEM simulation KW - Love wave KW - Rayleigh wave KW - humidity sensor KW - surface acoustic wave JF - Sensors (Basel, Switzerland) JO - Sensors (Basel) VL - 16 IS - 11 N2 - The characteristics of two types of surface acoustic waves SAWs (Rayleigh waves and Love waves) propagating in bilayered structures of (11 2 ¯ 0) ZnO/R-sapphire are simulated by a finite element method (FEM) model, in which both SAWs have crossed propagation directions. Furthermore, based on the bilayered structures, the frequency responses of Rayleigh wave and Love wave humidity sensors are also simulated. Meanwhile, the frequency shifts, insertion loss changes and then the sensitivities of both humidity sensors induced by the adsorbed water layer perturbations, including the mechanical and electrical factors, are calculated numerically. Generally, the characteristics and performances of both sensors are strongly dependent on the thickness of the ZnO films. By appropriate selecting the ratio of the film thickness to SAW wavelength for each kind of the sensors, the performances of both sensors can be optimized. SN - 1424-8220 UR - https://www.unboundmedicine.com/medline/citation/27827856/Simulation_of_SAW_Humidity_Sensors_Based_on__11_2_¯_0__ZnO/R_Sapphire_Structures_ L2 - http://www.mdpi.com/resolver?pii=s16111112 DB - PRIME DP - Unbound Medicine ER -
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