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Tungsten as a Chemically-Stable Electrode Material on Ga-Containing Piezoelectric Substrates Langasite and Catangasite for High-Temperature SAW Devices.
Materials (Basel). 2016 Feb 06; 9(2)M

Abstract

Thin films of tungsten on piezoelectric substrates La3Ga5SiO14 (LGS) and Ca3TaGa3Si2O14 (CTGS) have been investigated as a potential new electrode material for interdigital transducers for surface acoustic wave-based sensor devices operating at high temperatures up to 800 °C under vacuum conditions. Although LGS is considered to be suitable for high-temperature applications, it undergoes chemical and structural transformation upon vacuum annealing due to diffusion of gallium and oxygen. This can alter the device properties depending on the electrode nature, the annealing temperature, and the duration of the application. Our studies present evidence for the chemical stability of W on these substrates against the diffusion of Ga/O from the substrate into the film, even upon annealing up to 800 °C under vacuum conditions using Auger electron spectroscopy and energy-dispersive X-ray spectroscopy, along with local studies using transmission electron microscopy. Additionally, the use of CTGS as a more stable substrate for such applications is indicated.

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Authors+Show Affiliations

Rane GK
SAWLab Saxony, IFW Dresden, 270116 01171 Dresden, Germany. g.k.rane@ifw-dresden.de.
Seifert M
SAWLab Saxony, IFW Dresden, 270116 01171 Dresden, Germany. marietta.seifert@ifw-dresden.de.
Menzel S
SAWLab Saxony, IFW Dresden, 270116 01171 Dresden, Germany. s.menzel@ifw-dresden.de.
Gemming T
SAWLab Saxony, IFW Dresden, 270116 01171 Dresden, Germany. t.gemming@ifw-dresden.de.
Eckert J
Erich Schmid Institute of Materials Science, Austrian Academy of Sciences (ÖAW), Austria. juergen.eckert@unileoben.ac.at. Department Materials Physics, Montanuniversität Leoben, 12 A-8700 Leoben, Austria. juergen.eckert@unileoben.ac.at.

Pub Type(s)

Journal Article

Language

eng

PubMed ID

28787898

Citation

Rane, Gayatri K., et al. "Tungsten as a Chemically-Stable Electrode Material On Ga-Containing Piezoelectric Substrates Langasite and Catangasite for High-Temperature SAW Devices." Materials (Basel, Switzerland), vol. 9, no. 2, 2016.
Rane GK, Seifert M, Menzel S, et al. Tungsten as a Chemically-Stable Electrode Material on Ga-Containing Piezoelectric Substrates Langasite and Catangasite for High-Temperature SAW Devices. Materials (Basel). 2016;9(2).
Rane, G. K., Seifert, M., Menzel, S., Gemming, T., & Eckert, J. (2016). Tungsten as a Chemically-Stable Electrode Material on Ga-Containing Piezoelectric Substrates Langasite and Catangasite for High-Temperature SAW Devices. Materials (Basel, Switzerland), 9(2). https://doi.org/10.3390/ma9020101
Rane GK, et al. Tungsten as a Chemically-Stable Electrode Material On Ga-Containing Piezoelectric Substrates Langasite and Catangasite for High-Temperature SAW Devices. Materials (Basel). 2016 Feb 6;9(2) PubMed PMID: 28787898.
* Article titles in AMA citation format should be in sentence-case
TY - JOUR T1 - Tungsten as a Chemically-Stable Electrode Material on Ga-Containing Piezoelectric Substrates Langasite and Catangasite for High-Temperature SAW Devices. AU - Rane,Gayatri K, AU - Seifert,Marietta, AU - Menzel,Siegfried, AU - Gemming,Thomas, AU - Eckert,Jürgen, Y1 - 2016/02/06/ PY - 2016/01/05/received PY - 2016/02/04/accepted PY - 2017/8/10/entrez PY - 2016/2/6/pubmed PY - 2016/2/6/medline KW - electrode material KW - high temperature sensor KW - refractory metal thin film KW - surface acoustic wave devices JF - Materials (Basel, Switzerland) JO - Materials (Basel) VL - 9 IS - 2 N2 - Thin films of tungsten on piezoelectric substrates La3Ga5SiO14 (LGS) and Ca3TaGa3Si2O14 (CTGS) have been investigated as a potential new electrode material for interdigital transducers for surface acoustic wave-based sensor devices operating at high temperatures up to 800 °C under vacuum conditions. Although LGS is considered to be suitable for high-temperature applications, it undergoes chemical and structural transformation upon vacuum annealing due to diffusion of gallium and oxygen. This can alter the device properties depending on the electrode nature, the annealing temperature, and the duration of the application. Our studies present evidence for the chemical stability of W on these substrates against the diffusion of Ga/O from the substrate into the film, even upon annealing up to 800 °C under vacuum conditions using Auger electron spectroscopy and energy-dispersive X-ray spectroscopy, along with local studies using transmission electron microscopy. Additionally, the use of CTGS as a more stable substrate for such applications is indicated. SN - 1996-1944 UR - https://www.unboundmedicine.com/medline/citation/28787898/Tungsten_as_a_Chemically_Stable_Electrode_Material_on_Ga_Containing_Piezoelectric_Substrates_Langasite_and_Catangasite_for_High_Temperature_SAW_Devices_ DB - PRIME DP - Unbound Medicine ER -