Tags

Type your tag names separated by a space and hit enter

Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum.
Materials (Basel). 2015 Dec 19; 8(12):8868-8876.M

Abstract

Substrate materials that are high-temperature stable are essential for sensor devices which are applied at high temperatures. Although langasite is suggested as such a material, severe O and Ga diffusion into an O-affine deposited film was observed during annealing at high temperatures under vacuum conditions, leading to a damage of the metallization as well as a change of the properties of the substrate and finally to a failure of the device. Therefore, annealing of bare LGS (La 3 Ga 5 SiO 14) substrates at 800 ∘ C under high vacuum conditions is performed to analyze whether this pretreatment improves the suitability and stability of this material for high temperature applications in vacuum. To reveal the influence of the pretreatment on the subsequently deposited metallization, RuAl thin films are used as they are known to oxidize on LGS at high temperatures. A local study of the pretreated and metallized substrates using transmission electron microscopy reveals strong modification of the substrate surface. Micro cracks are visible. The composition of the substrate is strongly altered at those regions. Severe challenges for the application of LGS substrates under high-temperature vacuum conditions arise from these substrate damages, revealing that the pretreatment does not improve the applicability.

Links

PMC Free PDF
PMC Free Full Text
FREE Publisher Full Text

Authors+Show Affiliations

Seifert M
IFW Dresden, SAWLab Saxony, PO Box 270116, 01171 Dresden, Germany. marietta.seifert@ifw-dresden.de.
Rane GK
IFW Dresden, SAWLab Saxony, PO Box 270116, 01171 Dresden, Germany. g.k.rane@ifw-dresden.de.
Kirbus B
IFW Dresden, SAWLab Saxony, PO Box 270116, 01171 Dresden, Germany. b.kirbus@ifw-dresden.de.
Menzel SB
IFW Dresden, SAWLab Saxony, PO Box 270116, 01171 Dresden, Germany. s.menzel@ifw-dresden.de.
Gemming T
IFW Dresden, SAWLab Saxony, PO Box 270116, 01171 Dresden, Germany. t.gemming@ifw-dresden.de.

Pub Type(s)

Journal Article

Language

eng

PubMed ID

28793752

Citation

Seifert, Marietta, et al. "Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused By High Temperature Annealing Under High Vacuum." Materials (Basel, Switzerland), vol. 8, no. 12, 2015, pp. 8868-8876.
Seifert M, Rane GK, Kirbus B, et al. Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum. Materials (Basel). 2015;8(12):8868-8876.
Seifert, M., Rane, G. K., Kirbus, B., Menzel, S. B., & Gemming, T. (2015). Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum. Materials (Basel, Switzerland), 8(12), 8868-8876. https://doi.org/10.3390/ma8125497
Seifert M, et al. Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused By High Temperature Annealing Under High Vacuum. Materials (Basel). 2015 Dec 19;8(12):8868-8876. PubMed PMID: 28793752.
* Article titles in AMA citation format should be in sentence-case
TY - JOUR T1 - Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum. AU - Seifert,Marietta, AU - Rane,Gayatri K, AU - Kirbus,Benjamin, AU - Menzel,Siegfried B, AU - Gemming,Thomas, Y1 - 2015/12/19/ PY - 2015/10/14/received PY - 2015/12/08/revised PY - 2015/12/14/accepted PY - 2017/8/11/entrez PY - 2015/12/19/pubmed PY - 2015/12/19/medline KW - LGS KW - Langasite KW - RuAl KW - Surface Acoustic Waves KW - high-temperature KW - thin film SP - 8868 EP - 8876 JF - Materials (Basel, Switzerland) JO - Materials (Basel) VL - 8 IS - 12 N2 - Substrate materials that are high-temperature stable are essential for sensor devices which are applied at high temperatures. Although langasite is suggested as such a material, severe O and Ga diffusion into an O-affine deposited film was observed during annealing at high temperatures under vacuum conditions, leading to a damage of the metallization as well as a change of the properties of the substrate and finally to a failure of the device. Therefore, annealing of bare LGS (La 3 Ga 5 SiO 14) substrates at 800 ∘ C under high vacuum conditions is performed to analyze whether this pretreatment improves the suitability and stability of this material for high temperature applications in vacuum. To reveal the influence of the pretreatment on the subsequently deposited metallization, RuAl thin films are used as they are known to oxidize on LGS at high temperatures. A local study of the pretreated and metallized substrates using transmission electron microscopy reveals strong modification of the substrate surface. Micro cracks are visible. The composition of the substrate is strongly altered at those regions. Severe challenges for the application of LGS substrates under high-temperature vacuum conditions arise from these substrate damages, revealing that the pretreatment does not improve the applicability. SN - 1996-1944 UR - https://www.unboundmedicine.com/medline/citation/28793752/Surface_Effects_and_Challenges_for_Application_of_Piezoelectric_Langasite_Substrates_in_Surface_Acoustic_Wave_Devices_Caused_by_High_Temperature_Annealing_under_High_Vacuum_ L2 - https://www.mdpi.com/resolver?pii=ma8125497 DB - PRIME DP - Unbound Medicine ER -