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Porous Si nanowires for highly selective room-temperature NO2 gas sensing.
Nanotechnology 2018; 29(29):294001N

Abstract

We report the room-temperature sensing characteristics of Si nanowires (NWs) fabricated from p-Si wafers by a metal-assisted chemical etching method, which is a facile and low-cost method. X-ray diffraction was used to the the study crystallinity and phase formation of Si NWs, and product morphology was examined using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). After confirmation of Si NW formation via the SEM and TEM micrographs, sensing tests were carried out at room temperature, and it was found that the Si NW sensor prepared from Si wafers with a resistivity of 0.001-0.003 Ω.cm had the highest response to NO2 gas (Rg/Ra = 1.86 for 50 ppm NO2), with a fast response (15 s) and recovery (30 s) time. Furthermore, the sensor responses to SO2, toluene, benzene, H2, and ethanol were nearly negligible, demonstrating the excellent selectivity to NO2 gas. The gas-sensing mechanism is discussed in detail. The present sensor can operate at room temperature, and is compatible with the microelectronic fabrication process, demonstrating its promise for next-generation Si-based electronics fused with functional chemical sensors.

Authors+Show Affiliations

Non-Ferrous Materials Group, Korea Institute of Industrial Technology (KITECH), 137-41 Gwahakdanji-ro, Gangneung-si 25440, Republic of Korea.No affiliation info availableNo affiliation info availableNo affiliation info availableNo affiliation info availableNo affiliation info availableNo affiliation info availableNo affiliation info availableNo affiliation info available

Pub Type(s)

Journal Article

Language

eng

PubMed ID

29714169

Citation

Kwon, Yong Jung, et al. "Porous Si Nanowires for Highly Selective Room-temperature NO2 Gas Sensing." Nanotechnology, vol. 29, no. 29, 2018, p. 294001.
Kwon YJ, Mirzaei A, Na HG, et al. Porous Si nanowires for highly selective room-temperature NO2 gas sensing. Nanotechnology. 2018;29(29):294001.
Kwon, Y. J., Mirzaei, A., Na, H. G., Kang, S. Y., Choi, M. S., Bang, J. H., ... Kim, H. W. (2018). Porous Si nanowires for highly selective room-temperature NO2 gas sensing. Nanotechnology, 29(29), p. 294001. doi:10.1088/1361-6528/aac17b.
Kwon YJ, et al. Porous Si Nanowires for Highly Selective Room-temperature NO2 Gas Sensing. Nanotechnology. 2018 Jul 20;29(29):294001. PubMed PMID: 29714169.
* Article titles in AMA citation format should be in sentence-case
TY - JOUR T1 - Porous Si nanowires for highly selective room-temperature NO2 gas sensing. AU - Kwon,Yong Jung, AU - Mirzaei,Ali, AU - Na,Han Gil, AU - Kang,Sung Yong, AU - Choi,Myung Sik, AU - Bang,Jae Hoon, AU - Oum,Wansik, AU - Kim,Sang Sub, AU - Kim,Hyoun Woo, Y1 - 2018/05/01/ PY - 2018/5/2/pubmed PY - 2018/5/2/medline PY - 2018/5/2/entrez SP - 294001 EP - 294001 JF - Nanotechnology JO - Nanotechnology VL - 29 IS - 29 N2 - We report the room-temperature sensing characteristics of Si nanowires (NWs) fabricated from p-Si wafers by a metal-assisted chemical etching method, which is a facile and low-cost method. X-ray diffraction was used to the the study crystallinity and phase formation of Si NWs, and product morphology was examined using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). After confirmation of Si NW formation via the SEM and TEM micrographs, sensing tests were carried out at room temperature, and it was found that the Si NW sensor prepared from Si wafers with a resistivity of 0.001-0.003 Ω.cm had the highest response to NO2 gas (Rg/Ra = 1.86 for 50 ppm NO2), with a fast response (15 s) and recovery (30 s) time. Furthermore, the sensor responses to SO2, toluene, benzene, H2, and ethanol were nearly negligible, demonstrating the excellent selectivity to NO2 gas. The gas-sensing mechanism is discussed in detail. The present sensor can operate at room temperature, and is compatible with the microelectronic fabrication process, demonstrating its promise for next-generation Si-based electronics fused with functional chemical sensors. SN - 1361-6528 UR - https://www.unboundmedicine.com/medline/citation/29714169/Porous_Si_nanowires_for_highly_selective_room_temperature_NO2_gas_sensing_ L2 - https://doi.org/10.1088/1361-6528/aac17b DB - PRIME DP - Unbound Medicine ER -