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Novel Multilayer SAW Temperature Sensor for Ultra-High Temperature Environments.
Micromachines (Basel). 2021 May 31; 12(6)M

Abstract

Performing high-temperature measurements on the rotating parts of aero-engine systems requires wireless passive sensors. Surface acoustic wave (SAW) sensors can measure high temperatures wirelessly, making them ideal for extreme situations where wired sensors are not applicable. This study reports a new SAW temperature sensor based on a langasite (LGS) substrate that can perform measurements in environments with temperatures as high as 1300 °C. The Pt electrode and LGS substrate were protected by an AlN passivation layer deposited via a pulsed laser, thereby improving the crystallization quality of the Pt film, with the function and stability of the SAW device guaranteed at 1100 °C. The linear relationship between the resonant frequency and temperature is verified by various high-temperature radio-frequency (RF) tests. Changes in sample microstructure before and after high-temperature exposure are analyzed using scanning electron microscopy (SEM) and X-ray diffraction (XRD). The analysis confirms that the proposed AlN/Pt/Cr thin-film electrode has great application potential in high-temperature SAW sensors.

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Authors+Show Affiliations

Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

Pub Type(s)

Journal Article

Language

eng

PubMed ID

34072946

Citation

Zhou, Xuhang, et al. "Novel Multilayer SAW Temperature Sensor for Ultra-High Temperature Environments." Micromachines, vol. 12, no. 6, 2021.

Zhou X, Tan Q, Liang X, et al. Novel Multilayer SAW Temperature Sensor for Ultra-High Temperature Environments. Micromachines (Basel). 2021;12(6).

Zhou, X., Tan, Q., Liang, X., Lin, B., Guo, T., & Gan, Y. (2021). Novel Multilayer SAW Temperature Sensor for Ultra-High Temperature Environments. Micromachines, 12(6). https://doi.org/10.3390/mi12060643

Zhou X, et al. Novel Multilayer SAW Temperature Sensor for Ultra-High Temperature Environments. Micromachines (Basel). 2021 May 31;12(6) PubMed PMID: 34072946.

* Article titles in AMA citation format should be in sentence-case

TY - JOUR T1 - Novel Multilayer SAW Temperature Sensor for Ultra-High Temperature Environments. AU - Zhou,Xuhang, AU - Tan,Qiulin, AU - Liang,Xiaorui, AU - Lin,Baimao, AU - Guo,Tao, AU - Gan,Yu, Y1 - 2021/05/31/ PY - 2021/03/08/received PY - 2021/03/27/revised PY - 2021/03/29/accepted PY - 2021/6/2/entrez PY - 2021/6/3/pubmed PY - 2021/6/3/medline KW - AlN films KW - SAW sensor KW - high-temperature electrode KW - langasite JF - Micromachines JO - Micromachines (Basel) VL - 12 IS - 6 N2 - Performing high-temperature measurements on the rotating parts of aero-engine systems requires wireless passive sensors. Surface acoustic wave (SAW) sensors can measure high temperatures wirelessly, making them ideal for extreme situations where wired sensors are not applicable. This study reports a new SAW temperature sensor based on a langasite (LGS) substrate that can perform measurements in environments with temperatures as high as 1300 °C. The Pt electrode and LGS substrate were protected by an AlN passivation layer deposited via a pulsed laser, thereby improving the crystallization quality of the Pt film, with the function and stability of the SAW device guaranteed at 1100 °C. The linear relationship between the resonant frequency and temperature is verified by various high-temperature radio-frequency (RF) tests. Changes in sample microstructure before and after high-temperature exposure are analyzed using scanning electron microscopy (SEM) and X-ray diffraction (XRD). The analysis confirms that the proposed AlN/Pt/Cr thin-film electrode has great application potential in high-temperature SAW sensors. SN - 2072-666X UR - https://www.unboundmedicine.com/medline/citation/34072946/Novel_Multilayer_SAW_Temperature_Sensor_for_Ultra_High_Temperature_Environments_ DB - PRIME DP - Unbound Medicine ER -